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LAP2000 Laser Processing Tool
Laser Processing Tool
商品货号:ECS002680
商品品牌:Optec
PDF 文档: DownloadLAP2000 Laser Processing Tooldetails Document
详细介绍
LAP2000 Laser Processing Tool
LAP2000 Laser Ablation and Patterning tool for non-contact drilling, milling of technical polymers and medical products, laser lift-off (LLO).
规格
  • 激光类型 准分子(供应商和型号可选)
  • 工作波长 248nm(193nm可选)
  • 脉冲能量 可达700mJ
  • 重复频率 可达200Hz
  • 目标能量密度 0.5-5J/cm2
  • XY移动 300×300mm
  • XY速度 100mm/s
  • 分辨率 1mm
特性
  • 激光烧蚀清除聚合物不损失金属或基底
  • 激光光斑分布均匀
  • 计算机选择烧蚀部分或加工区域
  • 兼容CAD
  • 高效排烟
 
KEY FEATURES
  • Clean removal of polymer layers by laser ablation with no damage to metallization or      substrate
  • Large area super-uniform beam
  • PC selection of ablation motif/process area (MRA)
  • Linear motor X,Y stages with PSO for FOTF (Fire-on-the-fly) operation
  • Autoalign functions
  • CAD compatible
  • Efficient fume extraction
 
APPLICATIONS
 
  • Trimming of electronics packaging/contact cleaning,
  • Laser Lift-Off for GaN
  • Flat panel display/OLED
  • Waveguide milling
  • Surface treatments
 
MACHINE SPECIFICATIONS
 
 Laser Type:                               Excimer, choice of suppliers & models
Operating Wavelength                248nm (193nm option)
Pulse Energy                             up to 700mJ
Repetition rate                              up to 200Hz
On-target e.d.                           typically 0,5-5J/cm², depending on process
       Motifs                                Choice of PC driven motif selectors and/or MRA
       Process field                   Up to 8x8mm
Part Holding                            Vacuum chuck and/or wafer clamps
Environment                             Fume extractor/filter
X,Y machining area                          300x300mm(other sizes available on option)
Speed/position resolution              100mm/s, 1µm linear drive stages with PSO option
Theta stage option                     360° full rotation or +/-3° auto-trim stage options
Focus depth/part height(Z axis)    0-50mm
CCTV inspection                       Offset détented zoom, 45-300X; image acquisition, TTL
       Control Software                   ProcessPower multi-level access user-friendly interface with set-up & CAD conversion routines, auto-align functions & videa measuring cursor
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